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Publications by S. B. S. Heil

In Situ Reaction Mechanism Studies of Plasma-Assisted Atomic Layer Deposition of Al2O3

Applied Physics Letters
AstronomyPhysics
2006English

Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition

Journal of the Electrochemical Society
SurfacesCondensed Matter PhysicsOpticalElectrochemistrySustainabilityMaterials ChemistryMagnetic MaterialsRenewable EnergyFilmsCoatingsElectronicthe Environment
2006English

Reaction Mechanisms During Plasma-Assisted Atomic Layer Deposition of Metal Oxides: A Case Study for Al2O3

Journal of Applied Physics
AstronomyPhysics
2008English

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