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Publications by S. Merlo
Measurements on a Micromachined Silicon Gyroscope by Feedback Interferometry
IEEE/ASME Transactions on Mechatronics
Control
Systems Engineering
Computer Science Applications
Electrical
Electronic Engineering
Related publications
A Silicon Micromachined Flow Sensor Using Thermopiles for Heat Transfer Measurements
IEEE Transactions on Instrumentation and Measurement
Electronic Engineering
Electrical
Instrumentation
A Symmetric Surface Micromachined Gyroscope With Decoupled Oscillation Modes
Absolute Flatness Measurements of Silicon Mirrors by a Three-Intersection Method by Near-Infrared Interferometry
Nanoscale Research Letters
Materials Science
Nanotechnology
Condensed Matter Physics
Nanoscience
Micromachined Quartz Tuning Fork Gyroscope With High Overload Capacity
The Development of Micromachined Gyroscope Structure and Circuitry Technology
Sensors
Instrumentation
Information Systems
Electronic Engineering
Biochemistry
Analytical Chemistry
Molecular Physics,
Electrical
Atomic
Medicine
Optics
Silicon Integrated Interferometric Optical Gyroscope
Scientific Reports
Multidisciplinary
Analysis of Micromachined Fabry-Pérot Cavities Using Phase-Sensitive Optical Low Coherence Interferometry: Insight on Dimensional Measurements of Dielectric Layers
AIP Advances
Nanotechnology
Astronomy
Physics
Nanoscience
Absolute Distance Measurements by Laser Interferometry
Silicon Micromachined Ultrasonic Immersion Transducers
Applied Physics Letters
Astronomy
Physics
