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Publications by S.M. Gorbatkin
Electron Cyclotron Resonance Microwave Ion Sources for Thin Film Processing
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
High Energy Physics
Instrumentation
Nuclear
Metallization Technology for Tenth-Micron Range Integrated Circuits. CRADA Final Report for CRADA Number ORNL92-0104
Cu Deposition Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma Source
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