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Publications by Satoshi HAMAGUCHI

Measurement of Au Deposition Rates With Low-Energy Mass Separated Ion Beam Deposition Apparatus

English

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Low-Energy Mass-Selected Ion Beam Deposition of Silicon Carbide With Bernas-Type Ion Source Using Methylsilane

English

Improvement of Ta Barrier Film Properties in Cu Interconnection by Using a Non-Mass Separated Ion Beam Deposition Method

Materials Transactions

Mechanics of Materials

Materials Science

Condensed Matter Physics

Mechanical Engineering

English

Formation of Aluminum Films on Silicon by Ion Beam Deposition: A Comparison With Ionized Cluster Beam Deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

High Energy Physics

Instrumentation

English

Focused-Ion Beam Induced Deposition of Copper

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Preparation and Characterization of ITO Thin Films Deposition by Ion Beam Assisted Deposition

Journal of Korean Institute of Metals and Materials

Magnetic Materials

English

Atomistic Simulations of Low Energy Ion Assisted Vapor Deposition of Metal Multilayers

Journal of Applied Physics

English

Texture Development Mechanisms in Ion Beam Assisted Deposition

Journal of Applied Physics

English

ZnO Thin Films Prepared by Ion Beam Sputtering Deposition.

English

Measurement of Energy Deposition Near High Energy, Heavy Ion Tracks. Progress Report, December 1982-April 1985

English