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Publications by Seok-Joo Wang

Effects of H2Addition in Magnetized Inductively Coupled C2F6Plasma Etching of Silica Aerogel Film

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

Related publications

Rotation of Coulomb Crystals in a Magnetized Inductively Coupled Complex Plasma

IEEE Transactions on Plasma Science

High Energy Physics

Condensed Matter Physics

English

Development of Very Small-Diameter, Inductively Coupled Magnetized Plasma Device

Review of Scientific Instruments

Instrumentation

English

Characteristics of Inductively Coupled Cl2/BCl3 Plasmas During GaN Etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Condensed Matter Physics

English

Fabrication of Low Loss Polymer Inverse Ridge Waveguide Using Inductively Coupled Plasma Etching

Chinese Optics Letters

Electronic Engineering

Molecular Physics,

Magnetic Materials

English

Analysis of Zirconium Nitride Film by Inductively Coupled Plasma Emission Spectrometry

Analytical Sciences

Analytical Chemistry

English

Etch Characteristics of Nickel Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching

Electrochemical and Solid-State Letters

English

Predictions of Ion Energy Distributions and Radical Fluxes in Radio Frequency Biased Inductively Coupled Plasma Etching Reactors

Journal of Applied Physics

English

Interface Trap States in Al2O3/AlGaN/GaN Structure Induced by Inductively Coupled Plasma Etching of AlGaN Surfaces

Physica Status Solidi (A) Applications and Materials Science

Electronic Engineering

Condensed Matter Physics

Materials Chemistry

Magnetic Materials

English

Optical Shock Waves in Silica Aerogel

Molecular Physics,

English