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Publications by Shanshan Mao Shanshan Mao

Design of a Hyper-Numerical-Aperture Deep Ultraviolet Lithography Objective With Freeform Surfaces

Chinese Optics Letters

Electronic Engineering

Molecular Physics,

Magnetic Materials

English

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Ptychography as a Wavefront Sensor for High-Numerical Aperture Extreme Ultraviolet Lithography: Analysis and Limitations

Optical Engineering

Molecular Physics,

English

Approaching the Numerical Aperture of Water Immersion Lithography at 193-Nm

English

A General Multi-Objective Hyper-Heuristic for Water Distribution Network Design With Discolouration Risk

Journal of Hydroinformatics

Geotechnical Engineering

Engineering Geology

Atmospheric Science

Structural Engineering

English

Hyper High Numerical Aperature Achromatic Interferometer for Immersion Lithography at 193 Nm

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

English

Design of Optical Elements With TIR Freeform Surface

Computer Optics

Electronic Engineering

Pattern Recognition

Molecular Physics,

Computer Vision

Computer Science Applications

English

On Dynamic Analysis of Contact Problems With Freeform Surfaces: A Knee Joint 3d-Study

Journal of Biomechanics

Sports Medicine

Biomedical Engineering

English

Guest Editorial: Extreme Ultraviolet Interference Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Electronic Engineering

Condensed Matter Physics

Mechanical Engineering

Molecular Physics,

Magnetic Materials

English

Fiducial-Aided Robust Positioning of Optical Freeform Surfaces

Systems Engineering

Mechanical Engineering

Electronic Engineering

English

Evaluation of Optical Characteristics in Deep Ultraviolet Region. Measurement of Optical Elements Used for Excimer Laser Lithography.

Journal of the Spectroscopical Society of Japan

English