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Publications by Shigetoshi TANAKA
Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)
Kakuyūgō kenkyū
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Cu Deposition Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma Source
Hydrogen-Free SiCN Films Obtained by Electron Cyclotron Resonance Plasma
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Plasma Expansion From a Dielectric Electron Cyclotron Resonance Source
Physica Scripta
Condensed Matter Physics
Optics
Molecular Physics,
Mathematical Physics
Atomic
Astronomy
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A Contoured Gap Coaxial Plasma Gun With Injected Plasma Armature
Review of Scientific Instruments
Medicine
Instrumentation
Discharge Plasma Characteristics and Ion Beam Extraction on Electron Cyclotron Resonance (ECR) Ion Source Using Reentrant Coaxial Cavity
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
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Plasma Vacuum Ultraviolet Emission in an Electron Cyclotron Resonance Etcher
Applied Physics Letters
Astronomy
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Electron Cyclotron Resonance Plasma Enhanced Direct Current Sputtering Discharge With Magnetic-Mirror Plasma Confinement
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
High Electronegativity Multi-Dipolar Electron Cyclotron Resonance Plasma Source for Etching by Negative Ions
Journal of Applied Physics
Astronomy
Physics
Dual Role of Purification and Functionalisation of Single Walled CNT by Electron Cyclotron Resonance (ECR) Nitrogen Plasma
e-Journal of Surface Science and Nanotechnology
Surfaces
Mechanics of Materials
Condensed Matter Physics
Interfaces
Nanoscience
Bioengineering
Films
Biotechnology
Coatings
Nanotechnology
