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Publications by Shinji Tarutani

Materials and Process Parameters on ArF Immersion Defectivity Study

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

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The Need of Top Anti-Reflective Coating Materials for ArF Immersion Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

The Study on Developer Containing Surfactant for ArF Lithography Process

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

New Prospect of Successors to ArF Water-Immersion Lithography

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Electronic Engineering

Condensed Matter Physics

Mechanical Engineering

Molecular Physics,

Magnetic Materials

English

High Refractive Index Fluid for Next Generation ArF Immersion Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

A Simulation Study on Defectivity in Directed Self-Assembly Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

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Optical Materials for Immersion Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

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Study of Process Parameters on Machining Process Using Single Point Cutting Tool

Journal of Communications Technology, Electronics and Computer Science

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Study and Analysis on Karst Immersion Waterlogging Disaster

English

Optimization of Process Parameters in MIG Welding of Two Dissimilar Materials

International Journal of Innovative Technology and Exploring Engineering

Mechanics of Materials

Electronic Engineering

Structural Engineering

Computer Science

English