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Publications by So Ogino

Fundamental Study on Filter Effect of Confronting Divergent Magnetic Fields Applied to Low-Pressure Inductively Coupled Plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

English

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Pressure Dependence of Self-Generated Magnetic Fields in Laser-Produced Plasmas

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Characteristics of Inductively Coupled Cl2/BCl3 Plasmas During GaN Etching

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On Anomalous Temporal Evolution of Gas Pressure in Inductively Coupled Plasma

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