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Publications by Sookyung Choi
Comparative Study of Thermally Cured and Electron-Beam-Exposed Hydrogen Silsesquioxane Resists
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Related publications
Thin Electron Beam Defined Hydrogen Silsesquioxane Spacers for Vertical Nanowire Transistors
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
A Novel and Low Thermal Budget Planarization Scheme for Pre-Metal Dielectric Using Electron-Beam Cured HSQ (Hydrogen Silsesquioxane) in STC (Stacked Capacitor) DRAM
Hydrogen Silsesquioxane-Based Nanofluidics
Advanced Materials Interfaces
Mechanics of Materials
Mechanical Engineering
Correlation of Lithographic Performance of the Electron Beam Resists SML and ZEP With Their Chemical Structure
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Surfaces
Electronic Engineering
Condensed Matter Physics
Instrumentation
Electronic
Optical
Materials Chemistry
Electrical
Magnetic Materials
Films
Process Chemistry
Coatings
Technology
Influence of Electron Beam Irradiation on Thermally Stimulated Current in Polyetheretherketone
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Comparative Study of Cu-Precursors for 3D Focused Electron Beam Induced Deposition
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
A TEM Investigation of the Network Structure of Electron Beam Cured Epoxy Polymers
Microscopy and Microanalysis
Instrumentation
Electron Beam Sensitivity Study of the Los Alamos Advanced Free-Electron Laser Beam Line
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
High Energy Physics
Instrumentation
Nuclear
Observing Hydrogen Silsesquioxane Cross-Linking With Broadband CARS
Journal of Raman Spectroscopy
Materials Science
Spectroscopy
