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Publications by Susumu Sugiyama

Fabrication of Diaphragm Actuator Using Bulk PZT

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2006English

A Study on the Sub-Micron LIGA Process

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2001English

Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2001English

5-Axis Motion Sensor Using SOI Wafer and the Design Method

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2006English

Development of Plastic Injection Molding Using the LIGA Process

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2001English

Design of a Micro Multi-Axis Force-Moment Sensor

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2002English

Fabrication and Characterization of 3-Dof Soft-Contact Tactile Sensor Utilizing 3-Dof Micro Force Moment Sensor

IEEJ Transactions on Sensors and Micromachines
Electronic EngineeringElectricalMechanical Engineering
2007English

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