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Publications by Susumu Sugiyama
Fabrication of Diaphragm Actuator Using Bulk PZT
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
A Study on the Sub-Micron LIGA Process
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
5-Axis Motion Sensor Using SOI Wafer and the Design Method
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Development of Plastic Injection Molding Using the LIGA Process
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Design of a Micro Multi-Axis Force-Moment Sensor
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Fabrication and Characterization of 3-Dof Soft-Contact Tactile Sensor Utilizing 3-Dof Micro Force Moment Sensor
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering