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Publications by T. Höchbauer

Investigation of Plasma Hydrogenation and Trapping Mechanism for Layer Transfer

Applied Physics Letters

English

Plasma Hydrogenation of Strain-Relaxed SiGe∕Si Heterostructure for Layer Transfer

Applied Physics Letters

English

Thermal Stability of Diamondlike Carbon Buried Layer Fabricated by Plasma Immersion Ion Implantation and Deposition in Silicon on Insulator

Journal of Applied Physics

English