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Publications by T. Sizyuk
Enhancing Extreme Ultraviolet Photons Emission in Laser Produced Plasmas for Advanced Lithography
Physics of Plasmas
Condensed Matter Physics
Effects of Excitation Laser Wavelength on Ly-Α and He-Α Line Emission From Nitrogen Plasmas
Physics of Plasmas
Condensed Matter Physics
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Characteristics of Extreme Ultraviolet Emission From CO2 Laser-Produced Plasma
IEEJ Transactions on Electronics, Information and Systems
Electronic Engineering
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Guest Editorial: Extreme Ultraviolet Interference Lithography
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Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Interferometric Lithography With an Amplitude Division Interferometer and a Desktop Extreme Ultraviolet Laser
Journal of the Optical Society of America B: Optical Physics
Nonlinear Physics
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Atomic
Statistical
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Spectroscopic Study of Debris Mitigation With Minimum-Mass Sn Laser Plasma for Extreme Ultraviolet Lithography
Applied Physics Letters
Astronomy
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Extreme Ultraviolet Emission and Confinement of Tin Plasmas in the Presence of a Magnetic Field
Physics of Plasmas
Condensed Matter Physics
Improved Emission Uniformity From a Liquid-Jet Laser-Plasma Extreme-Ultraviolet Source
Applied Optics
Intense Plasma Discharge Source at 135 Nm for Extreme-Ultraviolet Lithography
Optics Letters
Optics
Atomic
Molecular Physics,
Short-Pulse Laser-Produced Plasmas
Springer Series in Chemical Physics
Theoretical Chemistry
Physical
Power Scaling of an Extreme Ultraviolet Light Source for Future Lithography
Applied Physics Letters
Astronomy
Physics
