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Publications by T.H. Smith
Run by Run Advanced Process Control of Metal Sputter Deposition
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
A Statistical Analysis of Single and Multiple Response Surface Modeling
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
Related publications
Integrating Feedback Control and Run-To-Run Control in Multi-Wafer Thermal Atomic Layer Deposition of Thin Films
Processes
Technology
Process Chemistry
Chemical Engineering
Bioengineering
Gaussian Process Regression for Virtual Metrology-Enabled Run-To-Run Control in Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
Run-To-Run Control of DC-sputtering Processes
Performance Evaluation of Run-To-Run Control Methods in Semiconductor Processes
Convergence Analysis of Run-To-Run Control for a Class of Nonlinear Systems
Short Run and Long Run
The Run-By-Run Monte Carlo Simulation for the ANTARES Experiment
EPJ Web of Conferences
Astronomy
Physics
Review Essay: Run Lola Run and Berlin Calling
Dancecult
Formation of Metal Nanoparticles by Short-Distance Sputter Deposition in a Reactive Ion Etching Chamber
Journal of Applied Physics
Astronomy
Physics
