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Publications by Takashi Fukada
Slip-Free Rapid Thermal Processing in Single Wafer Furnace
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Engineering
Astronomy
Physics
Related publications
Thermal Uniformity of 12-In Silicon Wafer During Rapid Thermal Processing by Inverse Heat Transfer Method
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
Application of Flash-Assist Rapid Thermal Processing Subsequent to Low-Temperature Furnace Anneals
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Rapid Thermal Processing to Enhance Steel Toughness
Scientific Reports
Multidisciplinary
Millisecond Rapid Thermal Annealing of Si Wafer Induced by High Density Thermal Plasma Jet Irradiation
Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Mechanics of Materials
Industrial
Mechanical Engineering
Manufacturing Engineering
Reduction of Thermal Conductivity in Wafer-Bonded Silicon
Applied Physics Letters
Astronomy
Physics
Furnace and Rapid Thermal Crystallization of Amorphous GexSi1−x and Si for Thin Film Transistors
Thin Solid Films
Surfaces
Alloys
Optical
Interfaces
Metals
Materials Chemistry
Magnetic Materials
Films
Coatings
Electronic
Dynamic Dislocation Mechanisms for the Anomalous Slip in a Single-Crystal BCC Metal Oriented for "Single Slip"
Processing and On-Wafer Test of Ferroelectric Film Microwave Varactors
Applied Physics Letters
Astronomy
Physics
