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Publications by Takehiko NAGAI
Development of Partial Pressure Gauge for Silane-Hydrogen Gas Mixtures Used for Production of Thin Film Silicon Solar Cell Materials
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
Spectroscopy
Materials Science
Measurement for Silane Density in Silane-Hydrogen Gas Mixtures Using a Quartz Sensor
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
Spectroscopy
Materials Science
