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Publications by Takeo Hattori
Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method
Similarity Between Strain Fields Induced by the Xe/Nh3 Plasma Nitridation and the Kr/O2 Plasma Oxidation Revealed by a Multi-Wave X-Ray Diffraction Phenomenon
Transactions of the Materials Research Society of Japan
Electric Characteristics of Si3N4 Films Formed by Directly Radical Nitridation on Si (110) and Si (100) Surfaces.
