Discover open access scientific publications

Search, annotate, share and cite publications

Publications by Takichi KOBAYASHI

Measurement of Silane Concentration in Silane-Hydrogen Gas Mixtures Using a Quartz Friction Pressure Gauge at Low Pressures and Low Silane Concentrations

Journal of the Vacuum Society of Japan

Instrumentation

Materials Science

English

Digital Data Processing for Quartz Friction Vacuum Gauge.

English