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Publications by Tetsuo KADO
Synthesis of Metal Oxycarbides by Inductively Coupled Radiofrequency Plasma Assisted Magnetron Sputtering Method
SHINKU
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Transport of Ionized Metal Atoms in High-Power Pulsed Magnetron Discharges Assisted by Inductively Coupled Plasma
Applied Physics Letters
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Synthesis of Iron Oxide Films by Reactive Magnetron Sputtering Assisted by Plasma Emission Monitoring
Materials Chemistry and Physics
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Condensed Matter Physics
Giant Magnetoresistance of NiFe/Cu Multilayers Prepared by Magnetron Sputtering Enhanced With an Inductively Coupled Rf Plasma
Journal of the Magnetics Society of Japan
Effect of Ion Irradiation for Ni Films Prepared on an Acrylonitrile-Butadiene-Styrene Resin Using Unbalanced Magnetron Sputtering Assisted by Inductively Coupled Plasma
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
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Effect of Ion Irradiation for Ni Films Prepared on a Flexible Substrate Material Using Magnetron Sputtering With Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
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Effect of Substrate Bipolar Pulse Voltage on the Properties of Cu Films on the Paper Substrate Using Magnetron Sputtering With Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma
Journal of the Vacuum Society of Japan
Surfaces
Instrumentation
Interfaces
Spectroscopy
Materials Science
Micro Variable Infrared Filter Using Magnetron Sputtering System Enhanced With an Inductively Coupled RF Plasma for CO2 Measurement.
SHINKU
Optical Absorption Measurements of Sputtered Ti Ion Density and Discussion of Ionization Mechanisms in Inductively Coupled Plasma-Assisted DC Sputtering
Journal of Plasma and Fusion Research
Synthesis of ZnO:N Thin Films by Reactive Dc Magnetron Sputtering
Lithuanian Journal of Physics
Astronomy
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