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Publications by Tomoki Nagai
Directed Self Assembly Materials for Semiconductor Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Directed Self Assembly Materials for Hole Patterning
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Integration of Directed Self-Assembly With 193 Nm Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Contact Hole Shrink Process Using Graphoepitaxial Directed Self-Assembly Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
A Simulation Study on Defectivity in Directed Self-Assembly Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Field-Theoretic Simulations of Directed Self-Assembly for Contact Multiplication
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
The SMARTTM Process for Directed Block Co-Polymer Self-Assembly
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Directed Self-Assembly Patterning for Forming Fin Field Effect Transistors
SPIE Newsroom
Self-Assembly in Materials Synthesis
MRS Bulletin
Materials Science
Theoretical Chemistry
Condensed Matter Physics
Physical
Metal-Directed Self-Assembly of Cavitand Frameworks
