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Publications by Tomuo YAMAGUCHI
Amorphous SiCS:H Films Prepared by Magnetron Sputtering of Si in CH4 and H2S
SHINKU
Properties of Amorphous SiC:O:H Films Prepared by Magnetron Sputtering of Si in CH4 and CO2.
SHINKU
Optical and Electrical Properties of Amorphous SiC:H Prepared by Magnetron Sputtering.
SHINKU
