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Publications by Y. Setsuhara
Electron Cyclotron Resonance Plasma Enhanced Direct Current Sputtering Discharge With Magnetic-Mirror Plasma Confinement
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Related publications
Development of a Space Plasma Environment Simulator Using the Electron Cyclotron Resonance Discharge.
SHINKU
Plasma Expansion From a Dielectric Electron Cyclotron Resonance Source
Physica Scripta
Condensed Matter Physics
Optics
Molecular Physics,
Mathematical Physics
Atomic
Astronomy
Physics
Production and Acceleration of Plasma by Electron Cyclotron Resonance (Coaxial Microwave Plasma Gun)
Kakuyūgō kenkyū
Hydrogen-Free SiCN Films Obtained by Electron Cyclotron Resonance Plasma
Journal of the Electrochemical Society
Surfaces
Condensed Matter Physics
Optical
Electrochemistry
Sustainability
Materials Chemistry
Magnetic Materials
Renewable Energy
Films
Coatings
Electronic
the Environment
Plasma Vacuum Ultraviolet Emission in an Electron Cyclotron Resonance Etcher
Applied Physics Letters
Astronomy
Physics
Two-Temperature Electron Discharge Plasma by Direct Heated Filaments
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Discharge Plasma Characteristics and Ion Beam Extraction on Electron Cyclotron Resonance (ECR) Ion Source Using Reentrant Coaxial Cavity
IEEJ Transactions on Fundamentals and Materials
Electronic Engineering
Electrical
Magnetic-Field-Enhanced Rf Argon Plasma for Ionized Sputtering of Copper
Applied Physics Letters
Astronomy
Physics
Cu Deposition Using a Permanent Magnet Electron Cyclotron Resonance Microwave Plasma Source
