Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Yan Xin Zhuang
Fluorocarbon Films Deposited by Deep Reactive Ion Etching for Stiction Minimization of MEMS Structures
Related publications
Reactive Ion Etching of PECVD Silicon Dioxide (SiO2) Layer for MEMS Application
Materials Analysis of Fluorocarbon Films for MEMS Applications
Reactive Ion Etching Characteristics of Permalloy Thin Films
Journal of the Magnetics Society of Japan
Effect of Ion Irradiation on Vanadium Oxide Thin Films Deposited by Reactive RF Sputtering Technique
International Journal of Recent Technology and Engineering
Engineering
Management of Technology
Innovation
HfSiON Films Deposited by Radio Frequency Reactive Sputtering
Integrated Reactive Ion Etching to Pattern Cross-Linked Hydrophilic Polymer Structures for Protein Immobilization
Applied Physics Letters
Astronomy
Physics
AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering
Applied Surface Science
Surfaces
Astronomy
Condensed Matter Physics
Interfaces
Films
Coatings
Chemistry
Physics
Magneto-Optical Disk Substrate Prepared by Reactive Ion Etching.
SHINKU
Etch Characteristics of Nickel Oxide Thin Films Using Inductively Coupled Plasma Reactive Ion Etching
Electrochemical and Solid-State Letters
