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Publications by Yan-Feng Wei
The Impact of Thickness and Thermal Annealing on Refractive Index for Aluminum Oxide Thin Films Deposited by Atomic Layer Deposition
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Electrical Characterization of Amorphous LiAlO2 Thin Films Deposited by Atomic Layer Deposition
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Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Effects of Seed Layer and Thermal Treatment on Atomic Layer Deposition-Grown Tin Oxide
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