Amanote Research
Register
Sign In
Discover open access scientific publications
Search, annotate, share and cite publications
Publications by Yangyao Ding
Integrating Feedback Control and Run-To-Run Control in Multi-Wafer Thermal Atomic Layer Deposition of Thin Films
Processes
Technology
Process Chemistry
Chemical Engineering
Bioengineering
Related publications
Run by Run Advanced Process Control of Metal Sputter Deposition
IEEE Transactions on Semiconductor Manufacturing
Electronic Engineering
Industrial
Condensed Matter Physics
Manufacturing Engineering
Optical
Electrical
Magnetic Materials
Electronic
Atomic Layer Deposition of Magnetic Thin Films
Acta Physica Polonica A
Astronomy
Physics
Perovskite Thin Films via Atomic Layer Deposition
Advanced Materials
Mechanics of Materials
Materials Science
Nanotechnology
Mechanical Engineering
Nanoscience
Run-To-Run Control of DC-sputtering Processes
Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Atomic/Molecular Layer Deposition of Cu-Organic Thin Films
Dalton Transactions
Inorganic Chemistry
Atomic Layer Deposition of Al-Doped ZnO Thin Films
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surfaces
Films
Interfaces
Condensed Matter Physics
Coatings
Performance Evaluation of Run-To-Run Control Methods in Semiconductor Processes
Atomic Layer Deposition of Conducting CuS Thin Films From Elemental Sulfur
Advanced Materials Interfaces
Mechanics of Materials
Mechanical Engineering
