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Publications by Yoshiyuki Matsu
5-Axis Motion Sensor Using SOI Wafer and the Design Method
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
Development of the 3-Axis Angular Velocity Sensor Using a Piezoelectric Element
IEEJ Transactions on Sensors and Micromachines
Electronic Engineering
Electrical
Mechanical Engineering
