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Publications by Yu KASORI

Preparation of Boron Nitride Thin Films by Using Plasma Chemical Transport of Boron.

Journal of the Surface Finishing Society of Japan
1995English

Related publications

Preparation of Cubic Boron Nitride Thin Film by the Helicon Wave Plasma Enhanced Chemical Vapor Deposition

Applied Physics Letters
AstronomyPhysics
1996English

Nanohardness and Chemical Bonding of Boron Nitride Films

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SurfacesAlloysOpticalInterfacesMetalsMaterials ChemistryMagnetic MaterialsFilmsCoatingsElectronic
1999English

Plasma-Enhanced Chemical Vapor Deposition of Boron Nitride Thin Films From B2H6–H2–NH3 and B2H6–N2 Gas Mixtures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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1998English

X-Ray Induced Modification of Electronic Properties of Boron Nitride Thin Films

Journal of Applied Physics
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2000English

Increase in Adhesion Strength and Thickness of Cubic Boron Nitride Thin Films by Silicon Addition

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
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A Brief Overview of RF Sputtering Deposition of Boron Carbon Nitride (BCN) Thin Films

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Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition (II)

SHINKU
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Synthesis of Boron Nitride From Boron Oxide Using Super-Critical Ammonia

Materials Transactions, JIM
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Formation of Cubic Boron Nitride by the Reactive Sputter Deposition of Boron

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