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Publications by Yu. A. Uspenskii

Terbium-Based Extreme Ultraviolet Multilayers

Molecular Physics,

English

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Experimental Comparison of Extreme-Ultraviolet Multilayers for Solar Physics

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Thermal Conduction Properties of Mo/Si Multilayers for Extreme Ultraviolet Optics

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Photoluminescence-Based Detection of Particle Contamination on Extreme Ultraviolet Reticles

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Extreme Ultraviolet Alignment and Testing of a Four-Mirror Ring Field Extreme Ultraviolet Optical System

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Experimental Investigation of Beryllium-Based Multilayer Coatings for Extreme Ultraviolet Lithography

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Guest Editorial: Extreme Ultraviolet Interference Lithography

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Coherence Techniques at Extreme Ultraviolet Wavelengths

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