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Publications by Yue Jia Zhang
Deep SiO2etching With Al and AlN Masks for MEMS Devices
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
Related publications
Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated With AlN Contour-Mode Resonators
Journal of Micromechanics and Microengineering
Mechanics of Materials
Electronic Engineering
Mechanical Engineering
Nanoscience
Optical
Electrical
Magnetic Materials
Nanotechnology
Electronic
High Performance Piezoelectric AlN MEMS Resonators for Precise Sensing in Liquids
Elektrotechnik und Informationstechnik
Electronic Engineering
Electrical
Electromagnetic MEMS Microspeaker for Portable Electronic Devices
Microsystem Technologies
Electronic Engineering
Condensed Matter Physics
Nanoscience
Hardware
Optical
Electrical
Architecture
Magnetic Materials
Nanotechnology
Electronic
Temporary Wafer Bonding – Key Technologogy for MEMS Devices
Nanoindustry Russia
Microwave MEMS Devices Designed for Process Robustness and Operational Reliability
International Journal of Microwave and Wireless Technologies
Electronic Engineering
Electrical
Operational Wear and Friction in MEMS Devices
Relaxation Rate and Polarization Charge Density Model for AlN/Al$_{x}$Ga$_{1 - X}$N/AlN Heterostructures
Turkish Journal of Electrical Engineering and Computer Sciences
Electronic Engineering
Electrical
Computer Science
Interactive Modelling and Simulation of Micromirror MEMS Devices
SNE Simulation Notes Europe
Modeling and Scheduling of MEMS-Based Storage Devices
