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Publications by Yusuke Anno
Directed Self Assembly Materials for Hole Patterning
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Double Patterning Materials for Sub-40nm Application
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Related publications
Directed Self Assembly Materials for Semiconductor Lithography
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Directed Self-Assembly Patterning for Forming Fin Field Effect Transistors
SPIE Newsroom
Contact Hole Shrink Process Using Graphoepitaxial Directed Self-Assembly Lithography
Journal of Micro/ Nanolithography, MEMS, and MOEMS
Electronic Engineering
Condensed Matter Physics
Mechanical Engineering
Electronic
Molecular Physics,
Nanoscience
Optical
Electrical
Atomic
Magnetic Materials
Nanotechnology
Optics
Self-Assembly Patterning of Nano/Micro-Particles [Translated]†
KONA Powder and Particle Journal
Materials Science
Engineering
Chemistry
Chemical Engineering
A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Electronic Engineering
Computer Graphics
Signal Processing
Applied Mathematics
Electrical
Computer-Aided Design
Hierarchical Luminescence Patterning Based on Multiscaled Self-Assembly
Field-Theoretic Simulations of Directed Self-Assembly for Contact Multiplication
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
The SMARTTM Process for Directed Block Co-Polymer Self-Assembly
Journal of Photopolymer Science and Technology
Organic Chemistry
Polymers
Materials Chemistry
Plastics
Self-Assembly in Materials Synthesis
MRS Bulletin
Materials Science
Theoretical Chemistry
Condensed Matter Physics
Physical
