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Publications by Zhaoning Yu

Measuring Thermal Emission Near Room Temperature Using Fourier-Transform Infrared Spectroscopy

Physical Review Applied

English

In Situ Real Time Process Characterization in Nanoimprint Lithography Using Time-Resolved Diffractive Scatterometry

Applied Physics Letters

English

Fabrication of 5nm Linewidth and 14nm Pitch Features by Nanoimprint Lithography

Applied Physics Letters

English