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Correlation of Lithographic Performance of the Electron Beam Resists SML and ZEP With Their Chemical Structure

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2015English

Molecular Beam Epitaxy Using Bismuth as a Constituent in InAs and a Surfactant in InAs/InAsSb Superlattices

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2014English

Fabrication of Top-Gated Epitaxial Graphene Nanoribbon FETs Using Hydrogen-Silsesquioxane

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2012English

Fabrication and Replication of Re-Entrant Structures by Nanoimprint Lithography Methods

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2018English

Plasma Jet Based in Situ Reduction of Copper Oxide in Direct Write Printing

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2019English

Analytic Estimation and Minimization of Line Edge Roughness in Electron-Beam Lithography

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2015English

Preparation and Characterization of Anticorrosion Polyurethane Paints and Coatings Based on Novel Zn-Free Phosphates

Journal of Coatings Technology Research
SurfacesColloidInterfacesFilmsCoatingsChemistrySurface Chemistry
2014English

Quantifying Reaction Spread and X-Ray Exposure Sensitivity in Hydrogen Silsesquioxane Latent Resist Patterns With X-Ray Spectromicroscopy

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2010English

Beyond Equilibrium Thermodynamics in the Low Temperature Plasma Processor

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2018English

Simplified Patterning Process for the Selective 1D ZnO Nanorods Growth

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2020English

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