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Publications in Polymers

Basic Aspects of Acid Generation Processes in Chemically Amplified Electron Beam Resist

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Flame Retardant Polyimidepolysiloxane-Based Solder Resist

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Towards Surface Growth Lithography Using Polymer Bound Photoactive Acid Generators

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

High Refractive Index Fluid for Next Generation ArF Immersion Lithography

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Condition and Effects of Various Plasmas After Passing Through the Slits

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Synthesis and Characterization of Microplasma-Polymerized Styrene and Propargyl Alcohol Films

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Photocuring Systems Using Quaternary Ammonium Thiocyanates.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Chemically Amplified Main Chain Scission: New Concept to Reduce Line Edge Roughness and Outgassing.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Generation of Amines by Using Photo-Triggered Thermal Deprotection

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English

Design of Novel ArF Negative Resist System for Phase-Shifting Lithography Using Androsterone Structure With .DELTA.-Hydroxy Acid.

Journal of Photopolymer Science and Technology

Organic Chemistry

Materials Chemistry

English