(PDF) Fabrication of Low Loss Polymer Inverse Ridge

Fabrication of Low Loss Polymer Inverse Ridge Waveguide Using Inductively Coupled Plasma Etching

Chinese Optics Letters - China

doi 10.3788/col201210.s12202

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Abstract

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Categories

Electronic Engineering

Molecular Physics,

Magnetic Materials

Date

January 1, 2012

Authors

Xiaoqiang Sun Xiaoqiang Sun

Kun Zhang Kun Zhang

Changming Chen Changming Chen

Xiaodong Li Xiaodong Li

Fei Wang Fei Wang

Daming Zhang Daming Zhang

Publisher

Shanghai Institute of Optics and Fine Mechanics

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