Direct Micromachining and Thin Film Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Ablative Photodecomposition
IEEJ Transactions on Electronics, Information and Systems - Japan
doi 10.1541/ieejeiss1987.116.12_1341
Full Text
Open PDFAbstract
Available in full text
Date
January 1, 1996
Authors
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)