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Micropatterning of highTcfilms With an Excimer Laser

Applied Physics Letters - United States
doi 10.1063/1.99678
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Abstract

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Categories
AstronomyPhysics
Date

April 11, 1988

Authors
J. MannhartM. ScheuermannC. C. TsueiM. M. OpryskoC. C. ChiC. P. UmbachR. H. KochC. Miller
Publisher

AIP Publishing


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