Study on Reduction of Micro-Scratch in Oxide CMP for Multi-Level Interconnection
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering - Japan
doi 10.2493/jjspe.74.1303
Full Text
Open PDFAbstract
Available in full text
Categories
Date
January 1, 2008
Authors
Publisher
Japan Society for Precision Engineering