Determination of Trace Amounts of Phosphorus in High-Purity Silicon by ICP-MS After Acid-Vapor Decomposition Under Elevated Pressure and Isolation as a Molybdophosphate-Dodecyltrimethylammonium Bromide Ion Pair.
Bunseki Kagaku - Japan
doi 10.2116/bunsekikagaku.47.187
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January 1, 1998
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Japan Society for Analytical Chemistry