Fabrication of Wide-If 200–300 GHz Superconductor–insulator–superconductor Mixers With Suspended Metal Beam Leads Formed on Silicon-On-Insulator
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
doi 10.1116/1.1798831
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Date
January 1, 2004
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American Vacuum Society