Thickness-Dependent Stress in Plasma-Deposited Silicon Dioxide Films

Journal of Applied Physics - United States
doi 10.1063/1.1870116
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Related search

Low-Temperature Deposition of Silicon Dioxide Films in High-Density Plasma

Semiconductor Physics, Quantum Electronics and Optoelectronics
Electronic EngineeringOpticsMolecular Physics,OpticalElectricalAtomicMagnetic MaterialsElectronic
2013English

Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

Journal of Applied Sciences
2017English

Development of Low Temperature Silicon Nitride and Silicon Dioxide Films by Inductively-Coupled Plasma Chemical Vapor Deposition

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
1999English

Depth-Dependent Spectroscopic Defect Characterization of the Interface Between Plasma-Deposited SiO2 and Silicon

Applied Physics Letters
AstronomyPhysics
1998English

Chacterization of Titanium Silicon Nitride Films Deposited by PVD

Vacuum
SurfacesInstrumentationCoatingsCondensed Matter PhysicsFilms
1999English

Optimization of in Situ Plasma Oxidation of Metallic Gadolinium Thin Films Deposited by High Pressure Sputtering on Silicon

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SurfacesElectronic EngineeringCondensed Matter PhysicsInstrumentationElectronicOpticalMaterials ChemistryElectricalMagnetic MaterialsFilmsProcess ChemistryCoatingsTechnology
2013English

Laser Desorption/Ionization Fourier Transform Mass Spectrometry of Thin Films Deposited on Silicon by Plasma Polymerization of Acetylene

Journal of the American Society for Mass Spectrometry
Structural BiologySpectroscopy
2010English

Properties of Silicon Dioxide Film Deposited by PECVD at Low Temperature/Pressure

Metallurgical and Materials Engineering
AlloysMetalsMechanical Engineering
2014English

Silicon Oxide Thickness-Dependent Growth of Carbon Nanotubes

Applied Physics Letters
AstronomyPhysics
2004English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy