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Effects of Microwave Power on the Structural and Emission Properties of Hydrogenated Amorphous Silicon Carbide Deposited by Electron Cyclotron Resonance Chemical Vapor Deposition
Journal of Applied Physics
- United States
doi 10.1063/1.1344218
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Categories
Astronomy
Physics
Date
March 1, 2001
Authors
J. Cui
S. F. Yoon
M. B. Yu
K. Chew
J. Ahn
Q. Zhang
E. J. Teo
T. Osipowicz
F. Watt
Publisher
AIP Publishing
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