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Low-Noise MEMS Vibration Sensor for Geophysical Applications
Journal of Microelectromechanical Systems
- United States
doi 10.1109/84.809058
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Categories
Electronic Engineering
Electrical
Mechanical Engineering
Date
January 1, 1999
Authors
J. Bernstein
R. Miller
W. Kelley
P. Ward
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
