Full Three-Dimensional Morphology Evolution of Amorphous Thin Films for Atomic Layer Deposition

AIP Advances - United States
doi 10.1063/1.5025008
Full Text
Abstract

Available in full text

Date
Authors
Publisher

AIP Publishing

Related search

Electrical Characterization of Amorphous LiAlO2 Thin Films Deposited by Atomic Layer Deposition

RSC Advances
ChemistryChemical Engineering
2016English

Atomic Layer Deposition of Magnetic Thin Films

Acta Physica Polonica A
AstronomyPhysics
2007English

Perovskite Thin Films via Atomic Layer Deposition

Advanced Materials
Mechanics of MaterialsMaterials ScienceNanotechnologyMechanical EngineeringNanoscience
2014English

Atomic/Molecular Layer Deposition of Cu-Organic Thin Films

Dalton Transactions
Inorganic Chemistry
2018English

Atomic Layer Deposition of Al-Doped ZnO Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2013English

Atomic Layer Deposition of Conducting CuS Thin Films From Elemental Sulfur

Advanced Materials Interfaces
Mechanics of MaterialsMechanical Engineering
2018English

Spectroscopic Characterization of Highly Doped ZnO Films Grown by Atomic-Layer Deposition for Three-Dimensional Infrared Metamaterials [Invited]

Optical Materials Express
OpticalElectronicMagnetic Materials
2011English

Atomic Layer Deposition of Absorbing Thin Films on Nanostructured Electrodes for Short-Wavelength Infrared Photosensing

Applied Physics Letters
AstronomyPhysics
2015English

Comparison of Thermal and Plasma-Enhanced Atomic Layer Deposition of Niobium Oxide Thin Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
SurfacesFilmsInterfacesCondensed Matter PhysicsCoatings
2018English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy