Silicon Microfabrication: Controlled Microfabrication of High-Aspect-Ratio Structures in Silicon at the Highest Etching Rates: The Role of H2 O2 in the Anodic Dissolution of Silicon in Acidic Electrolytes (Adv. Funct. Mater. 6/2017)

Advanced Functional Materials - United Kingdom
doi 10.1002/adfm.201770035
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Wiley

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