Pulsed Plasma Initiated Chemical Vapor Deposition (PiCVD) of Polymer Layers − a Kinetic Model for the Description of Gas Phase to Surface Interactions in Pulsed Plasma Discharges
Plasma Processes and Polymers - Germany
doi 10.1002/ppap.201800121
Full Text
Open PDFAbstract
Available in full text
Date
October 21, 2018
Authors
Publisher
Wiley