Investigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets
Izvestiya Vuzov. Tsvetnaya Metallurgiya (Proceedings of Higher Schools. Nonferrous Metallurgy)
doi 10.17073/0021-3438-2015-4-55-62
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Date
August 12, 2015
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National University of Science and Technology MISiS