(PDF) Investigation of the Si–B–C–N Thin Coatings Deposited

Investigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets

Izvestiya Vuzov. Tsvetnaya Metallurgiya (Proceedings of Higher Schools. Nonferrous Metallurgy)

doi 10.17073/0021-3438-2015-4-55-62

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Abstract

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Date

August 12, 2015

Authors

F. V. Kiryukhantsev-Korneev

Publisher

National University of Science and Technology MISiS

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