Development of a New Hybrid Approach Combining AFM and SEM for the Nanoparticle Dimensional Metrology

Beilstein Journal of Nanotechnology - Germany
doi 10.3762/bjnano.10.150
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Beilstein Institut

Related search

Metrology AFM and Nanometrology

Hyomen Kagaku
2006English

HybridMR: A New Approach for Hybrid MapReduce Combining Desktop Grid and Cloud Infrastructures

Concurrency Computation Practice and Experience
Computer NetworksCommunicationsComputer Science ApplicationsComputational TheoryMathematicsTheoretical Computer ScienceSoftware
2015English

Development of Fatigue Testing System for In-Situ Observation by AFM & SEM

MATEC Web of Conferences
Materials ScienceEngineeringChemistry
2019English

Morphological Method for Surface Metrology and Dimensional Metrology Based on the Alpha Shape

Measurement Science and Technology
InstrumentationEngineeringApplied Mathematics
2011English

A Wireless Sensor Network-Based Approach to Large-Scale Dimensional Metrology

International Journal of Computer Integrated Manufacturing
Electronic EngineeringIndustrialMechanical EngineeringManufacturing EngineeringComputer Science ApplicationsElectricalAerospace Engineering
2010English

TSOM Method for Nanoelectronics Dimensional Metrology

2011English

Multimodal Low-Dimensional Materials Characterization With Correlative Microscopy: Raman-Pl-Flim-Afm-Snom-Sem

Microscopy and Microanalysis
Instrumentation
2016English

Model-Based Library for Critical Dimension Metrology by CD-SEM

Microscopy and Microanalysis
Instrumentation
2014English

Registration of AFM and SEM Scans Using Local Features

International Journal of Optomechatronics
Electronic EngineeringElectricalMechanical EngineeringInstrumentation
2011English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2025 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy