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Electrical Trimming Characteristics of Polysilicon Nanofilms With Different Doping Concentrations and Deposition Temperatures
Journal of Nanomaterials
- United States
doi 10.1155/2020/7379867
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Categories
Materials Science
Nanotechnology
Nanoscience
Date
February 24, 2020
Authors
Xuebin Lu
Rui Weng
Xiaowei Han
Bin Yu
Bing Yang
Publisher
Hindawi Limited
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