Integration of CMP Fixed Abrasive Polishing Into the Manufacturing of Thick Film SOI Substrates

Materials Research Society Symposium - Proceedings - United States
doi 10.1557/proc-867-w3.4
Full Text
Abstract

Available in full text

Date
Authors
Publisher

Cambridge University Press (CUP)

Related search

A Novel CMP Process on Fixed Abrasive Pads for the Manufacturing of Highly Planar Thick Film SOI Substrates

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2003English

Advances in the CMP Process on Fixed Abrasive Pads for the Polishing of SOISubstrates With High Degree of Flatness

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
2004English

The Development of AC Electric Field Assisted Polishing for Silicon Carbide Substrates With Control of Abrasive Behavior

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
2013English

Considerations in Formulation and Manufacturing of Thick Film Inks

Microelectronics Journal
1983English

Evaluation of Cadmium-Free Thick Film Materials on Alumina Substrates

2009English

AEM Study of Thin and Thick Film Metallization on AIN Substrates

Materials Research Society Symposium - Proceedings
Mechanics of MaterialsMaterials ScienceCondensed Matter PhysicsMechanical Engineering
1987English

Development of a High Efficiency Polishing Technology Using Abrasive Control Technique With AC Electric Field for Glass Substrates

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Mechanical Engineering
2011English

High-Strain Response of Piezoresistive Thick-Film Resistors on Titanium Alloy Substrates

Journal of the European Ceramic Society
CompositesMaterials ChemistryCeramics
2004English

Abrasive Processing and Polishing Technology. Latest Abrasive Materials and Finishing Processes.

Journal of the Surface Finishing Society of Japan
1998English

Amanote Research

Note-taking for researchers

Follow Amanote

© 2024 Amaplex Software S.P.R.L. All rights reserved.

Privacy PolicyRefund Policy