The Development of AC Electric Field Assisted Polishing for Silicon Carbide Substrates With Control of Abrasive Behavior

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering- Japan

doi 10.2493/jjspe.79.87

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Abstract

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Mechanical Engineering

Date

January 1, 2013

Authors

Takayuki KUSUMI

Noritsugu UMEHARA

Publisher

Japan Society for Precision Engineering

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